ADC Delivers World's Most Advanced Extreme-Ultraviolet (EUV) Microscope
11/15/2012 - 11/30/-0001
ADC completed the design, fabrication, assembly, testing and installation of a state-of-the-art high-resolution extreme-ultraviolet-light (EUV) microscope for imaging of EUV photomasks, located at Lawrence Berkeley National Laboratory (Berkeley Lab). The system was designed for nano meter (nm)-scale stability, light exclusion (internal darkness), and ease of maintenance. The system operates near ultra-high vacuum (UHV) conditions, requiring a base pressure of 1e-7 Torr, and therefore has a high degree of cleanliness and the exclusive use of compatible materials and components that do not outgas. Owing to the high resolution of the microscope (down to 30-nm), the system was designed for nm-scale relative stability of the critical mask and (zone plate) lens over exposure time periods up to one minute. For more information please go to:
Major components of the system include: a large vacuum chamber to house the experimental area, active vibration control system, 3 axis in-vacuum motion stages and an automated load-lock for inserting the EUV photomasks. A mask-transfer system enables masks to be loaded and unloaded from the system chamber. The mask transfer system gently, cleanly, and safely handles the mask loading, installation, unloading and removal. For more information please visit: http://www.adc9001.com/products/view/429
ADC has over 17 years of experience and extensive capability in the machining and manufacturing of complex systems for the scientific community. In making the announcement, ADC President and CEO, Alexander Deyhim, stated, "Completion of this large complex project on schedule and meeting all the technical requirements demonstrates ADC’s staff commitment to quality and its ability to deliver complex turn-key systems to customers that demand the best in the industry”.
The Lawrence Berkeley National Laboratory, is a U.S. Department of Energy (DOE) national laboratory conducting unclassified scientific research. It is located on the grounds of the University of California, Berkeley, in the Berkeley Hills above the central campus. It is managed and operated by the University of California for the DOE.
About the company: Founded in 1995, ADC USA, Inc. custom designs devices, integrated systems and a broad array of high-precision components and instruments for commercial, academic and government agencies worldwide. The company’s work covers mechanical design, control instrumentation, control software, manufacturing and assembly, and installation and training. For additional information, visit the ADC web site at www.adc9001.com.